The 20th (2020) Yamazaki-Teiichi Prize Winner Semiconductor, AI, System, and Softwar
Contributions to the Establishment and Practical Application of Basic Technology for SiC Power Semiconductors
| Winner | ||
|---|---|---|
| Tsunenobu Kimoto Professor, Graduate School of Engineering, Kyoto University |
| Winner | ||
|---|---|---|
| Takashi Nakamura Specially Appointed Professor, Graduate School of Engineering, Osaka University |
Reason for award
Semiconductors for power conversion enable great power loss reduction and compactification of devices using silicon carbide (SiC) instead of silicon (Si). However, practical use of SiC devices could not be realized as of 1990, due to the lack of fundamental technology in both aspects of materials and devices. Dr. Kimoto established the fundamental technology of SiC power semiconductors. The contents of this technology include demonstration of devices with 4H-SiC, development of high quality epitaxial growth technology, clarification of the physical properties, great reduction of crystal defects, establishment of ion-implantation technology, precise characterization and quality improvement of oxide film / SiC interface, and accurate determination of the carrier lifetime, mobility, dielectric breakdown electric field, and impact ionization coefficients required for power semiconductor design. Such fundamental technology has been extensively accepted around the world, and been used for SiC power semiconductor development.
Dr. Kimoto and Dr. Nakamura solved the technical issues of power semiconductors through industry-university cooperative research between Kyoto University and ROHM Co., Ltd., and developed and demonstrated SiC power semiconductors which greatly exceed the performance of Si. Based on the industry-university cooperative research between Kyoto University, ROHM Co., Ltd. and Tokyo Electron Limited, Tokyo Electron Limited developed and commercialized automated SiC epitaxial film growth equipment for mass production. SiC power semiconductors realized by such fundamental technology and practical application technology are now having a great impact on society.
Due to the above reason, Dr. Kimoto and Dr. Nakamura were selected as the award winners in the Semiconductors & AI ・ System ・ Software field for The 20th Yamazaki-Teiichi Prize.