| Method (English name) |
Measuring method (abbreviation) |
| Electron Microscope Observation / Analysis |
| (Scanning) Transmission Electron Microscopy |
(S)TEM |
| Electron Diffraction Mapping |
TEM ED-Map |
| Energy Dispersive X-ray Spectroscopy (TEM) |
TEM-EDX |
| Electron Energy Loss Spectroscopy |
TEM-EELS |
| Electron Diffraction |
ED |
| Scanning Electron Microscopy |
SEM |
| Three-dimensional SEM Observation |
Slice&View |
| Energy Dispersive X-ray Spectroscopy (SEM) |
SEM-EDX |
| Electron Backscattering Diffraction |
EBSD |
| Electron Beam Induced Current |
EBIC |
| Scanning Ion Microscopy |
SIM |
| Mass Spectrometry |
| Secondary Ion Mass Spectrometry |
SIMS |
| Time-of-Flight Secondary Ion Mass Spectrometry |
TOF-SIMS |
| Gas Chromatography Mass Spectrometry |
GC/MS |
| Liquid Chromatography Mass Spectrometry |
LC/MS |
| High Performance Liquid Chromatography |
HPLC |
| Ion Chromatography |
IC |
| Inductively Coupled Plasma Mass Spectrometry |
ICP-MS |
| Thermal Desorption Spectrometry |
TDS |
| Glow Discharge Mass Spectrometry |
GDMS |
| SPM |
| Spreading Resistance Analysis |
SRA |
Scanning Capacitance Microscopy
Scanning Nonlinear Dielectric Microscopy |
SCM
SNDM |
| Scanning Microwave Microscopy |
SMM |
| Scanning Spreading Resistance Microscopy |
SSRM |
| Atomic Force Microscopy |
AFM |
| Atomic Force Microscope based Mechanical Analysis/Atomic Force Microscope based Dynamic Mechanical Analysis |
AFM-MA･AFM-DMA |
| Atomic Force Microscope based Infrared Spectroscopy |
AFM-IR |
| Magnetic Force Microscopy |
MFM |
| Non-destructive inspection / failure analysis |
| X-ray Computed Tomography |
|
| Constant-depth mode Scanning Acoustic Microscorpe |
C-SAM |
| Emission Microscopy |
EMS |
| Optical Beam Induced Resistance Change |
OBIRCH |
| Lock-in thermal emission |
|
| Electron spectroscopy |
| Auger Electron Spectroscopy |
AES |
| X-ray Photoelectron Spectroscopy |
XPS |
| Ultraviolet Photoelectron Spectroscopy |
UPS |
| X-ray absorption fine structure |
XAFS |
| Soft X-ray emission spectroscopy |
SXES |
| X-ray diffraction method |
| X-ray Diffraction |
XRD |
| X-ray Reflectance |
XRR |
| Small Angle X-ray Scattering |
SAXS |
| Vibration spectroscopy |
| Fourier Transform Infrared Spectroscopy |
FT-IR |
| Optical Photothermal Induced Resonance |
O-PTIR |
| Raman Spectroscopy |
Raman |
| Other measurement methods |
| white interferometric method |
|
| Total Organic Carbon |
TOC |
| Karl Fischer titration |
|
| Thermogravimetry-Differential Thermal Analysis and Mass Spectrometry |
TG-DTA-MS |
| Differential Scanning Calorimetry |
DSC |
| Photo Luminescence |
PL |
| Absolute PL quantum yields measurement |
|
| Ultraviolet Visible Absorption Spectroscopy |
UV-Vis |
| X‐ray Fluorescence |
XRF |
| Rutherford Back-Scattering Spectroscopy |
RBS |
| Computational Science and Data Analysis |
|
| Processing method |
| Focused ion beam processing |
FIB |
| Ar ion milling processing |
|
| Ultra microtome processing |
|
| Ar ion polishing |
IP |
| Cryo processing |
|
| Processing for measurement from the substrate side |
SSDP |
| Processing under controlled atmosphere |
|
| Laser processing |
|