X-ray Computed Tomography
By irradiating the sample with X-rays, a two-dimensional transmission image of the internal structure of the sample can be obtained. In addition, X-ray CT (computed tomography) images are constructed from the continuous imaging data of the rotated sample.
[C-SAM] Constant-depth mode Scanning Acoustic Microscorpe
C-SAM is a method for nondestructive observation of defects, such as delamination, in a sample.
[EMS] Emission Microscopy
EMS is a method for detecting the faint light emission generated by abnormal operation of semiconductor devices to quickly identify the failure location, also known as EMMS, PEM or EMI.
[OBIRCH] Optical Beam Induced Resistance Change
OBIRCH is a method to identify the defective point by using the change in resistance caused by the heat generated by shining light on the defective point.
Lock-in thermal emission
The lock-in heat analysis method detects a slight temperature increase in the current path.