Manufacturing equipment / parts

The contamination or foreign matter on the surface of components in manufacturing equipment can cause product contamination. Therefore, we provide a service to cut a sample, even a sample of hard material, to an appropriate size and analyze its surface structure and composition.
The followings are examples of analysis on the compoments in manufacturing equipment and parts.

評価項目 Analysis Method
構造・形状・寸法 SEMTEM
不純物の分布・拡散評価 SIMS
異物の成分評価 AESXPSTOF‐SIMSRamanFT‐IRSEM‐EDXTEM‐EDXXRF
表面の変色原因調査 AESXPSTOF‐SIMSSEM‐EDX
表面の化学結合状態評価 XPSTOF‐SIMS
表面の凹凸評価 AFMwhite interferometric method
結晶構造評価 XRDEBSDED
脱ガスの分析 GC/MSTDS
腐食成分の評価 IC

製造装置・部品の分析事例はこちらからご覧ください。

Consultation and application for analysis

Our knowledgeable sales representatives will propose the most appropriate analysis plan.
Please feel free to contact us for a quote on the cost of your analysis.
For consultation and application, please use the inquiry form or call us.

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てむぞう&ますみん

Temuzo&Masumin