Optical device

Semiconductor lasers are widely used for consumer products such as copy machines and pickup devices for optical disks, as well as for industrial products such as devices for communications i.g. optical fiber and devices for microfabrication.
Since the luminescence color depends on the band gap of the semiconductor, it is important to form good crystals and interfaces. The followings are examples of analysis on the components in optical devices.

評価対象 評価項目 部位 Analysis Method
活性層 ドーパント分布評価 実製品 SIMS
活性層形状評価 実製品 SCMSMMSSRMSEM
構造・膜厚・結晶欠陥評価 実製品 TEM
非発光箇所の特定 実製品 EMSOBIRCH
量子ドットの構造観察 実製品 TEM
基板 ウエハ表面汚染評価 バルク・薄膜 XPSTOF‐SIMSICP‐MS
結晶性評価 バルク・薄膜 XRD
結晶欠陥評価 バルク・薄膜 PLTEM
応力評価 バルク・薄膜 RamanXRD
実製品 TEMED
不純物分布評価 バルク・薄膜 SIMS

光デバイスの分析事例はこちらからご覧ください。

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