[SIMS] Secondary Ion Mass Spectrometry
When ions are injected onto the surface of a sample, various particles such as electrons, neutrals, and ions are emitted from the surface of the sample.SIMS is a method for qualitative and quantitative analysis of the components contained in a sample by detecting ions in these particles and measuring the amount of ions detected at each mass.
[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry
This is a method for structural analysis of the sample surface. This method is suitable for the identification of organic contamination on the top surface, because it is more sensitive to the surface than other analyzers. It is possible to analyze the distribution of inorganic and organic materials in the depth direction using a spat-lion source.
[ICP-MS] Inductively Coupled Plasma Mass Spectrometry
Because ICP-MS analyzes solutions, it is relatively easy to prepare standards that are difficult to prepare by solid-state analysis. For this reason, it is frequently used for the precise determination of very small amounts of inorganic elements in solution.
[IC] Ion Chromatography
Ion chromatography is a method for detecting ionic components in a liquid sample.
[GC/MS] Gas Chromatography Mass Spectrometry
Gas chromatography (GC) is classified as a type of chromatographic method and is a method of separating components by utilizing the adsorbability of the gas to the stationary phase or differences in the distribution coefficient, etc.
Gas chromatography-mass spectrometry (GC/MS) enables the qualitative and quantitative determination of components from mass information by using a mass spectrometer for the detection of components separated by GC.
[HPLC] High Performance Liquid Chromatography
High performance liquid chromatography (HPLC) is a type of chromatographic method that uses the difference in the interaction between the stationary and mobile phases to separate and detect components in a liquid.
[LC/MS] Liquid Chromatography Mass Spectrometry
LC/MS is an analytical method for the qualitative and quantitative analysis of organic compounds. The term liquid chromatography (LC) refers to the separation of liquid samples using chromatographic principles. LC/MS is used to detect components using a mass spectrometer.
[GDMS]Glow Discharge Mass Spectrometry
GDMS is a method for analyzing the composition of a solid sample from the main components to the trace components simultaneously, and for semi-quantitative analysis of the impurities present in the sample.
［TDS］Thermal Desorption Spectrometry
TDS is a mass spectrometry method that can monitor the gases generated by vacuum heating/heating for each temperature. The TDS spectrum shows the temperature on the horizontal axis and the ion intensity on the vertical axis. This makes it possible to compare the amount of desorption of the emitted gas and to compare the desorption temperature. In addition, hydrogen and water can be analyzed with high sensitivity because of the vacuum atmosphere.