[EBIC] Electron Beam Induced Current

EBIC:Electron Beam Induced Current

装置外観

Features

When acquiring SEM images, the electron beam creates electron-hole pairs which in a PN junction form a current that can be measured. This drift current is called electron beam induced current (EBIC). By measuring it synchronously with the scanning electron beam image acquisition, it is possible to visualize the position of P-N junctions and the distribution of their depletion layers. The EBIC method can be used to analyse:


  • P-N junctions and crystal defects such as dislocations and stacking faults
  • Position of P-N junctions and crystal defects
概要

Application Examples

  • Analysis of the P-N junction positions in power semiconductors
  • Analysis of P-N junction locations in solar cells

Principle

The electron beam irradiation in a SEM instrument causes generation of holeelectron pairs in the sample.

Normally, these carriers recombine and annihilate, but if the pairs are generated in a region with an internal electric field, such as a depletion layer, the carriers accelerated by the field and drift. This drift current can be measured externally to obtain information on the internal electric field structure, for example the junction structure of semiconductor devices. The drift current is larger in areas where the minority carriers have a shorter lifetime in the crystal so an EBIC measurement can also locate dislocations and stacking faults.

概要

Data examples

測定原理

Data delivery format

JPEG file. TIFF files can be provided on request.

Specifications

プレーナ型パワーMOSの断面分析例

Items for enquiries

  • Purpose and content of measurement
  • Sample information
    1. Number of samples, and availability of preliminary samples
    2. Location and area of analysis, layer structure, thickness of films, electrode, and circuits
    3. Handling instructions
  • Details on delivery
    1. Preferred due date for preliminary analysis report
    2. Due date for delivery of final report
  • Any other issues

Caution

  • Sample processing and observation may alter or deform the sample.
  • Hydrocarbon and other substances may adsorb to the sample during analysis.

[EBIC]電子線誘起電流の分析事例はこちらからご覧ください。

Consultation and application for analysis

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Temuzo&Masumin