Processing method

[FIB] Focused Ion Beam

FIB is a focused ion beam with a diameter ranging from a few nm to several hundred nm. By scanning the sample surface, it is possible to shave a specific region (sputtering) or to deposit carbon (C), tungsten (W), platinum (Pt), etc. on a specific region. The SIM image, which detects the secondary electrons generated by irradiating the sample with an ion beam, can be used to recognize the processed shape of the sample.

Ar ion milling process

Ar ion milling is a process to produce thin film samples with a thickness of 50 nm or less for transmission electron microscopy by finishing with a low-voltage Ar ion beam after mechanical polishing.

Ultra microtome processing

Ultra-microtome processing is a processing method for cutting bulk samples with a diamond knife to produce ultra-thin sections with a thickness of 100 nm or less for transmission electron microscopy. Unlike ion beam processing, a wide range of sections can be made in the atmosphere. Ultra-thin sections of biomaterials and soft polymeric materials, which are difficult to cut at room temperature, can be made by freezing and fixing them.

[Processing for SSDP] Processing for measurement from the substrate side

With secondary ion mass spectrometry (SIMS), steep elemental distributions may not be obtained due to the unevenness of the sample surface, knock-on effects where atoms on the surface are pushed to the back side by ion irradiation, and crater bottom roughness. To solve this problem, the SSDP (Back-Side SIMS) method is used to perform SIMS analysis from the thinned substrate side (back side). This method enables more accurate evaluation of elemental distribution without being influenced by sample shape or measurement conditions.

[IP method] Ar ion polishing

The IP (Ion Polishing) method is a type of polishing method that uses an ion beam to process the material. It is also called the CP method (Cross-section Polisher).

Processing under controlled atmosphere

By performing sample pre-treatment, transfer and measurement in a high-purity inert gas atmosphere, surface oxidation, moisture absorption and contamination adhesion are suppressed, and the original condition of the sample can be evaluated.

Cryo processing

Organic and polymeric material samples and gel-like materials that are too soft to be machined at room temperature can be cooled and hardened to enable processing. Cryofabrication allows us to make ultra-thin sections and cross-sections of materials with low Tg (glass transition temperature), which is difficult at room temperature.

Laser processing

Ultra-short pulsed lasers with micron-level positioning accuracy can be used to quickly produce samples with low damage.

Consultation and application for analysis

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てむぞう&ますみん

Temuzo&Masumin