［SEM] Scanning Electron Microscopy
SEM is a method of obtaining the contrast between the unevenness and composition of a sample based on the information of electrons emitted from the sample when an electron beam is applied to it.
［SEM-EDX] Energy Dispersive X-ray Spectroscopy (SEM)
EDX (also known as Energy Dispersive X-ray Spectroscopy) is a technique for elemental and compositional analysis by detecting characteristic X-rays generated by electron irradiation and spectroscopically analyzing them with energy. Often included with SEM or TEM, this document describes the EDX included with SEM.
［Slice&View] Three-dimensional SEM Observation
Using a high-resolution SEM system with FIB, it is possible to obtain three-dimensional structural information by reconstructing the acquired image through detailed repetition of cross-sectional processing with FIB (Slice) and observation with SEM (View). In addition, SIM (Scanning Ion Microscope) images can be sliced and viewed in the same way.
［EBIC] Electron Beam Induced Current
Irradiation of electrons in the SEM system generates hole electron pairs in the sample. Normally, they recombine and disappear, but when a hole electron pair is generated in a region with an internal electric field, such as a depletion layer, the carrier is drifted by the internal electric field and can be extracted outside as an electromotive current. This electromotive current is called EBIC (Electron Beam Induced Current), and together with the SEM image, it is possible to visualize the position of the pn junction and the spread of the depletion layer.
[EBSD]Electron Backscattering Diffraction
This is a method to analyze the orientation of crystalline samples using EBSD. It is easier than the electron diffraction method to obtain a wide range of crystal information.
[(S)TEM] (Scanning) Transmission Electron Microscopy
TEM is a technique to irradiate a flattened sample with an electron beam to form an image of the electrons that pass through the sample or are scattered, and observe them at high magnification.
[TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM)
EDX is a method for elemental analysis and compositional analysis by measuring the energy and number of characteristic X-rays generated by electron irradiation of the target region. In many cases, the EDX is included with the SEM or TEM, and this document introduces the EDX included with the TEM.
[TEM-EELS] Electron Energy Loss Spectroscopy
EELS analysis is a method of measuring the energy lost by the interaction of electrons with atoms as they pass through a thin sample. It is possible to analyze the constituent elements and electronic structure of materials.
[ED] Electron Diffraction
ED is a technique to study the crystal structure from the diffraction pattern obtained by irradiating a sample with an electron beam.
[TEM ED-Map] Electron Diffraction Mapping
This is a method to analyze the orientation distribution of a crystalline sample by using TEM electron diffraction.
[SIM] Scanning Ion Microscopy
When a solid sample is irradiated with an ion beam, secondary electrons are generated. The secondary electrons produce a contrast depending on the crystal orientation of each grain. This image is called a Scanning Ion Microscope (SIM) image.