[XPS]X-ray Photoelectron Spectroscopy

XPS:X-ray Photoelectron Spectroscopy

装置外観

Fig. 1.XPS equipment in operation

Features

XPS is a technique for measuring the kinetic energy distribution of photoelectrons emitted as a result of X-ray irradiation. It is used to obtain knowledge about the type, abundance, and chemical bonding state of elements present on the sample surface down to a depth of several nm.


It is also called Electron Spectroscopy for Chemical Analysis (ESCA) because it provides insight into the chemical bonding states. XPS has the following features:

  • Qualitative and quantitative determination of elements on solid surfaces (down to a depth of about 2-8 nm).
  • Chemical bonding state analysis.
  • Non-destructive.
  • Depth profiling in combination with ion sputtering.
  • Insulators are measurable.
  • Measurement under controlled atmosphere possible.

Application Examples

  • Evaluation of chemical states and products (depots) of plasma etched surfaces.
  • Verifying cleaning of wafer surfaces.
  • Evaluation of thickness and the degree of oxidation of silicon oxide, nitride, and oxynitride films.
  • Confirmation of the chemical state of the surface modified layer of metal films, e.g., Cu.
  • Composition and chemical state on the electrode surfaces of secondary battery materials.
  • Evaluation of stainless-steel surface passivating layer.
  • Investigation of the composition and chemical state of solar cell materials.
  • Evaluation of luminescence properties and chemical states of organic electro-luminescent thin films.
  • Verifying cleaning of lithography masks.
  • Evaluation of the chemical state of lubricants on magnetic disk surfaces.
  • Investigation of the deterioration of water repellent glass surface coating films.
  • Evaluation of constituents and optical properties of antireflective coatings.
  • Evaluation of the composition and chemical states of photocatalytic films.

Principle

XPS measures the kinetic energy distribution of photoelectrons which are emitted as a result of X-ray irradiation. The principle of generation of photoelectrons is as follows. Their binding energy can be calculated from the energy of the irradiating X-rays and the kinetic energy of the photoelectrons (see Equation 1 in Fig. 2). Since the X-ray energy hv is known, Eb can be obtained by measuring Ek.
Since Eb has an intrinsic value for an element and its electronic state, it is possible to obtain information about the element in a sample and its chemical bonding state.

原理

Data examples

データ例
データ例

Data delivery formats

  • PDF file : Wide scan spectrum (qualitative), narrow scan spectrum (chemically bonded state), waveform separation spectra etc.
  • Excel file : Quantitative values, numerical data of photoelectron spectra.

Specifications

データ例

Items for enquiries

  • Purpose and contents of measurement
  • Sample information
  1. Number of samples, and availability of preliminary samples.
  2. Shape, layer structure, film thickness, how to identify the sample measurement surface, processing (if any), and possibility of sample breakage (cutting, etc.)
  3. Handling instructions
  • Details on delivery
  1. Preferred due date for preliminary analysis report.
  2. Due date for delivery of final report.
  • Any other issues

Cautions

Assessment may be difficult under certain circumstances. Please consult us prior to ordering if:

  • Significant surface contamination.
  • Remarkable surface roughness.
  • Region of interest has a depth of more than 2 mm from the surrounding area.
  • Depth analysis of films thicker than 5 μm.
  • Sample contains sublimating substances or exhibits large outgassing.
  • Samples are magnetic.
  • Samples are poisonous and/or easily forming aerosols.

[XPS]X線光電子分光法の分析事例はこちらからご覧ください。

Consultation and application for analysis

Our knowledgeable sales representatives will propose the most appropriate analysis plan.
Please feel free to contact us for a quote on the cost of your analysis.
For consultation and application, please use the inquiry form or call us.

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てむぞう&ますみん

Temuzo&Masumin